Browsing by Author "Ger, Avron"
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Publication Scatterometry and AFM measurement combination for area selective deposition process characterization
Proceedings paper2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109591NPublication Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devices
Oral presentation2018, SPIE Advanced Lithography ConferencePublication Scatterometry Application on Cu/SiCN surface topography towards high volume manufacturing
; ; ; Proceedings paper2024, 10th IEEE Electronics System-Integration Technology Conference (ESTC), SEP 11-13, 2024