Browsing by Author "Gijbels, R."
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Publication Depth profiling of ZrO2/SiO2/Si stacks - a TOF-SIMS and computer simulation study
Journal article2004, Applied Surface Science, 231-232, p.603-608Publication Depth profiling of ZrO2/SiO2/Si stacks-a TOF-SIMS and computer simulation study
Proceedings paper2004-05, Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectrometry and Related Topics - SIMS XIV, 14/09/2003, p.603-608Publication Depth profiling of ZrO2/SiO2/Si stacks-TOF-SIMS and computer simulation study
Meeting abstract2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIV, 14/09/2003, p.94Publication Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation
Journal article2005-02, Applied Physics A, (81) 1, p.71-77Publication Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks
Journal article2003, Applied Surface Science, 203-204, p.523-526Publication The dawn of surface analysis that stands by the side of users - Ultra-thin film analysis by rf-GDOES
Journal article2004, Engineering Materials, p.97-101