Browsing by Author "Gillot, Christophe"
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Publication Ge, III/V Materials CMP
Oral presentation2012, CAMP's 17th International Symposium on Chemical-Mechanical PlanarizationPublication III-V CMP process development
Proceedings paper2013, International Conference on Planarization/CMP Technology, 30/10/2013Publication III/V CMP process development
Proceedings paper2013, International Conference on Planarization/CMP Technology, 30/10/2013Publication Impact of dummy metal structures on post oxide CMP planarization
Proceedings paper1999, 4th International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC, 11/02/1999, p.413-416Publication Optimized pore stuffing for enhanced compatibility with interconnect integration flow
; ; ; Publication The impact of ALD TaN barrier processes on different BEOL utra low-k dielectrics
Meeting abstract2015, AVS Topical Conference on Atomic Layer Deposition, 28/06/2015Publication The impact of PEALD TaN barrier processes on different ultra low-k dielectrics
Journal article2015, ECS Journal of Solid State Science and Technology, (4) 12, p.N160-N162