Browsing by Author "Haider, Ali"
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Publication Dry Resist Metrology Readiness for High-NA EUVL
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 1249612Publication E-beam metrology and line local critical dimension uniformity of thin dry resist films for high numerical aperture extreme ultraviolet lithography
Journal article2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 4, p.Art. 044001Publication Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations
Proceedings paper2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021Publication Pulsed chemical vapor deposition of conformal GeSe for application as an OTS selector
Journal article2021, MATERIALS ADVANCES, (2) 5, p.1635-1643Publication Pulsed CVD of amorphous GeSe for application as OTS selector
Meeting abstract2019, AVS ALD 2019, 22/07/2019Publication Pulsed CVD/ALD of amorphous GeSe for application as OTS selector
Meeting abstract2019, EuroCVD 22 - Baltic ALD 16 Conference, 24/06/2019