Browsing by Author "Himcinschi, C."

Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-K SiO2 xerogel films

Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films

Ellipsometric study of the change in the porosity of silica xerogels after chemical modification of the surface with hexamethyldisilazane

Ellipsometric study of the change in the porosity of silica xerogels after surface chemical modification with hexamethyldisilizane

Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance

Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation

Strained silicon-on-insulator : fabrication and characterization