Browsing by Author "Jansen, Henri"
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Publication Boosted RF-MEMS capacitive shunt switches
Proceedings paper2002, Proceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens, 29/11/2002, p.667-671Publication Comparison of Bosch and cryogenic processes for patterning high aspect ration features in silicon
Publication Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
Publication Metal and polySi (Ge) micromechanical devices for high frequency application
Proceedings paper2000, Proceedings of SeSens, 30/11/2000, p.673-676Publication Micromachined devices for space telecom applications
Proceedings paper2000, Proceedings 3rd Round Table on Micro/Nano-Technologies for Space, 15/05/2000, p.135-140Publication Novel RF-MEMS capacitive switching structures
Proceedings paper2002, Proceedings 32nd European Microwave Conference, 23/09/2002, p.809-812Publication Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process
Publication Ta2O5 as gate dielectric maerial for low-voltage organic thin-film transistors
Journal article2002, Organic Electronics, 3, p.65-72Publication The black silicon method. VIII. A study of the performance of etching silicon using Sf6/O-2-based chemistry with cryogenical wafer cooling and a high density ICP Source
Publication Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab
; ; ; Proceedings paper2001, Proceedings IEDM; Washington, DC, December 3-5, 2001., p.921-924