Browsing by Author "Kissoon, Nicola"
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Publication Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry
Proceedings paper2023-04-28, SPIE Advanced Lithography + Patterning, 2023, p.1249407-1-1249407-10Publication E-TEST validation of EPE budget and metrology
Oral presentation2020, SPIE advanced lithography - Metrology, Inspection, and Process Control for Microlithography XXXIVPublication E-test validation of space error budget and metrology
Journal article2022-06-30, IEEE Transactions on Semiconductor Manufacturing, (35) 3, p.478-484Publication Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning
; ; ; ; ; Kissoon, NicolaProceedings paper2019, Extreme Ultraviolet (EUV) Lithography X, 24/02/2019, p.109570SPublication iN5 EUV Single Expose Patterning Evaluation for Via Layers
Proceedings paper2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021, p.1185418