Browsing by Author "Knoll, Armin"
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Publication Advanced etching for nanodevices and 2D materials
Meeting abstract2016, SNM special session at MNE Conference, 19/09/2016Publication Conversion of a patterned organic resist into a high performance inoriganic hard mask for high resolution pattern transfer
Journal article2018, ACS Nano, (12) 11, p.11152-11160Publication Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning
Proceedings paper2017, 43rd International Conference on Micro and Nanoengineering - MNE, 18/09/2017Publication Molecular glass resists for all-dry high-resolution scanning probe lithography
Publication Molecular glass resists for scanning probe lithography
Publication Sequential infiltration synthesis for pattern transfer of sub 20 nm thermal scanning probe lithography patterns
Meeting abstract2018, ALD Conference, 29/07/2018