Browsing by Author "Koret, R."
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication 300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition
; ; ; ; Koret, R.Journal article2023, APPLIED SURFACE SCIENCE, (626) July, p.Art. 157222Publication 300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124961XPublication First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers
Proceedings paper2020, IEEE Symposium on VLSI Technology and Circuits, JUN 15-19, 2020