Browsing by Author "Kwak, Dong Hwa"
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Publication ALD deposition of high-k and metal gate stacks for advanced CMOS applications
Proceedings paper2004, Atomic Layer Deposition Conference, 16/08/2004Publication Correlation between stress-induced leakage current (SILC) and the HfO2 bulk trap density in a SiO2/HfO2 stack
Proceedings paper2004-04, Proceedings IEEE International Reliability Physics Symposium - IRPS, 25/04/2004, p.181-187Publication High-k dielectrics integration prospects
Proceedings paper2005, ULSI Process Integration IV, 15/05/2005, p.169-192Publication Hot carrier degradation on n-channel SiO2/HfSiO MOSFETs: Effects on the devices performance and lifetime
Proceedings paper2005, 43rd Annual IEEE International Reliability Physics Symposium Proceedings, 17/04/2005, p.275-279Publication On the defect generation and low voltage extrapolation of QBD in SiO2/HfO2 stacks
Proceedings paper2004, Technical Digest VLSI Technology Symposium, 15/06/2004, p.140-141Publication Reliability issues in high-k stacks
Proceedings paper2004-09, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 15/09/2004, p.70-71Publication Scaling of Hf-based high-k dielectrics
Meeting abstract2004, International Workshop on Dielectric Thin Films for Future ULSI Devices, 26/05/2004, p.5-6