Browsing by Author "Lamagna, Luca"
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Publication Al2O3 stacks on In0.53Ga0.47As substrates: In situ investigation of the interface
Journal article2011, Microelectronic Engineering, (88) 4, p.435-439Publication Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substrates
Journal article2011, Microelectronic Engineering, (88) 4, p.431-434Publication Improved performance of In0.53Ga0.47As-based metal-oxide-semiconductor capacitors with Al:ZrO2 gate dielectric grown by atomic layer deposition
Publication Interface analysis of Ge ultra thin layers intercalated between GaAs substrates and oxide stacks
Journal article2010, Thin Solid Films, (518) 6, Suppl. 1, p.S123-S127Publication Interface quality of atomic layer deposited La-doped ZrO2 films on Ge-passivated In0.15Ga0.85As substrates
Proceedings paper2009, High-k Dielectrics on Semiconductors with High Carrier Mobility, 30/11/2009, p.1194-A08-10Publication Reconstruction dependent reactivity of As-decapped In0.53Ga0.47As(001) surfaces and its influence on the electrical quality of the interface with Al2O3 grown by atomic layer deposition
Journal article2011, Applied Physics Letters, (99) 19, p.193505