Browsing by Author "Li, W."
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Publication Buried metal line compatible with 3D sequential integration for top tier planar devices dynamic Vth tuning and RF shielding applications
Proceedings paper2019, 2019 Symposia on VLSI Technology and Circuits, 9/06/2019, p.T56-T57Publication Impact of in-situ annealing on the deep levels in Ni-Au/AlN/Si MIS Capacitors
Journal article2019, Physica Status Solidi A, (216) 17, p.1900248-1-1900248-5Publication Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation
Journal article2016, Applied Physics Letters, (109) 12, p.122902Publication The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass
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