Browsing by Author "Lin, S."
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Publication Advanced surface preparation leading into the nano-era
Oral presentation2003, Semicon Europe 2003Publication Issues, achievements and challenges towards integration of high-k dielectrics
Proceedings paper2002, Frontiers in Electronics. Future Chips. Proceedings of the 2002 Workshop, 6/01/2002, p.?-?Publication Issues, achievements and challenges towards intergration of high-k dielectrics
Proceedings paper2002, 5th International Forum on Semiconductor Technology - IFST, 21/02/2002Publication On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
; ; ; ; Publication On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
; ; ; ; Publication The influence of defects on campatibility and yield of the HfO2-polysilicon gate stack for CMOS integration
Proceedings paper2003, Novel Materials and Processes for Advanced CMOS, 2/12/2002, p.335-340