Browsing by Author "Luysberg, Martina"

Effects on the HE implantation energy on the strain relaxation of epitaxial Si0.8Ge0.2/Si(100) heterostructures

In-situ TEM on He implantation induced defects in SiGe/Si

Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications

Non-selective and selective thin SiGe strain-relaxed buffer layers: growth and carbon-induced relaxation

Strain relaxation of SiGe/Si by He implantation: controlling dislocation sources at He precipitates

Strain relaxation of SiGe/Si heterostructures by helium ionimplantation and subsequent annealing : Helium precipitates acting as dislocation sources

Strained silicon on relaxed SiGe made by strain transfer

The role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structures

The use of ion implantation of strained silicon on SiO2 for nanoelectronic devices

Thin SiGe strain-relaxed buffer layers: carbon-induced relaxation

Thin SiGe strain-relaxed buffer layers: relaxation mechanism and integration in strained Si MOS-FETs