Browsing by Author "Manabe, Y."
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Publication Effect of postdeposition anneal conditions on defect density of HfO2 layers measured by wet etching
Journal article2004, Journal of the Electrochemical Society, (151) 11, p.F269-F275Publication Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviour
Proceedings paper2003, Extended Abstracts International Workshop on Gate Insulator - IWGI, 6/11/2003, p.62-63Publication Issues, achievements and challenges towards integration of high-k dielectrics
Proceedings paper2002, Frontiers in Electronics. Future Chips. Proceedings of the 2002 Workshop, 6/01/2002, p.?-?Publication Issues, achievements and challenges towards intergration of high-k dielectrics
Proceedings paper2002, 5th International Forum on Semiconductor Technology - IFST, 21/02/2002