Browsing by Author "Masahito, Sugiura"
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Publication ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties
Proceedings paper2011, Carbon-Based Electronic Devices. Processing, Performance and Reliabilty, 29/11/2010, p.mrsf10-1283-b10Publication Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
Oral presentation2011, Workshop on Graphene and Carbon NanotubesPublication Characterization of carbon nanotubes based vertical interconnects
Proceedings paper2012, International Conference on Solid State Devices and Materials - SSDM, 25/09/2012, p.648-649Publication Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
Proceedings paper2012, IEEE International Interconnect Technology Conference - IITC, 4/06/2012Publication Electrical characterization of CNT contacts with Cu damascene top contact
Journal article2013, Microelectronic Engineering, 106, p.106-111Publication Electrical improvement of CNT contacts with Cu damascene top metallization
Proceedings paper2013, IEEE International Interconnect Technology Conference - IITC, 13/06/2013, p.13-MarPublication Growth and integration challenges for carbon nanotubes interconnects
Journal article2014, Microelectronic Engineering, 120, p.188-193Publication Low temperature CNT growth for BEOL interconnects
Oral presentation2013, MRS Fall MeetingPublication Low temperature CNT growth kinetics for interconnects
Meeting abstract2013, MRS Fall Meeting, 1/06/2013Publication Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects
Journal article2011, Nanotechnology, (22) 8, p.85302