Browsing by Author "Meuris, Marc"
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Publication 18% efficiency IBC cell with rear-surface processed on quartz
Journal article2013, IEEE Journal of Photovoltaics, (3) 2, p.684-689Publication 200 mm Germanium-on-insulator(GeOI) by smart cut technology and recent GeOI MOSFETs achievements
Publication 7.6% CZGSe solar cells thanks to optimized CdS chemical bath depostion
Journal article2018, Physica Status Solidi A, (215) 13, p.1800043Publication A DLTS study of Pt/Al2O3/InxGa1-xAs capacitors
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.1961Publication A DLTS study of Pt/Al2O3/InxGa1-xAs capacitors
Proceedings paper2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.151-161Publication A fast and accurate method to study the impact of interface traps on germanium MOS performance
Journal article2011, IEEE Transactions on Electron Devices, (58) 4, p.938-944Publication A first-principles study of the structural and electronic properties of III-V/thermal oxide interfaces
Journal article2009, Microelectronic Engineering, (86) 7_9, p.1747-1750Publication A high-performance drying method enabling clustered single wafer wet cleaning
Proceedings paper2000, Symposium on VLSI Technology. Digest of Technical Papers, 13/06/2000, p.56-57Publication A multi-stack Al2O3/HfO2 design with contact openings for front surface of Cu(In,Ga)Se-2 solar cells
; ; ; ; ; Proceedings paper2021, 48th IEEE Photovoltaic Specialists Conference (PVSC), JUN 20-25, 2021, p.1176-1178Publication A new cleaning concept for particle and metal removal on Si surfaces
Proceedings paper1994, Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 15/10/1993, p.15-25Publication A novel approach for the elimination of the pattern density dependence of CMP for shallow trench isolation
Proceedings paper1998, Proceedings of the 3rd International Chemical-Mechanical-Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC, p.313-318Publication A novel environmentally-friendly corrosion-free post-stripping rinsing procedure after solvent strip
Proceedings paper1997, Symposium on VLSI Technology: Digest of Technical Papers, 10/06/1997, p.37-38Publication A novel resist and post-etch residue removal process using ozonated chemistry
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.165-168Publication A novel resist and post-etch residue removal process using ozonated chemistry
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication A Novel Strategy for the Application of an Oxide Layer to the Front Interface of Cu(In,Ga)Se_2 Thin Film Solar Cells: Al_2O_3/HfO_2 Multi-Stack Design With Contact Openings
; ; ; ; ; Journal article2022, IEEE JOURNAL OF PHOTOVOLTAICS, (12) 1, p.301-308Publication A semi-quantitative method for studying photoresist stripping
Proceedings paper1994, Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 15/10/1993, p.581-586Publication A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology
Journal article1999, Japanese Journal of Applied Physics. Part 1: Regular Papers, (38) 4A, p.1932-1938Publication A step towards a better understanding of silicon passivated (100) Ge p-channel
; ; ; ; Proceedings paper2007, Advanced Gate Stack , Source/Drain and Channel Engineering for Si-Based CMOS 3, 6/05/2007, p.53-63Publication A study of the degradation mechanisms of ultra thin CIGS solar cells submitted to a damp heat environment
Oral presentation2019, MRS Spring meeting 2019Publication A study of the degradation mechanisms of ultra-thin CIGS solar cells submitted to a damp heat environment
Proceedings paper2019, IEEE PVSC-46, 16/06/2019