Browsing by Author "Moinpour, Mansour"

Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric

Composite polymer core – ceria shell abrasive particles during silicon oxide CMP

Composite polymer core–silica shell abrasives: effect of polishing time and slurry solid content on oxide CMP

Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP

Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study

Copper CMP with composite polymer core – silica shell abrasives: a defectivity study

Copper CMP with composite polymer core – silica shell abrasives: a defectivity study

Copper CMP with composite polymer core - silica shell abrasives: A defectivity study

Defectivity study during oxide CMP with composite polymer core – silica shell abrasives: the effect of the silica particle shape

Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM

Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM

Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP

Mixed organic/inorganic abrasive particles during oxide CMP

Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing

Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP