Browsing by Author "Mouche, Laurent"
- Results per page
- Sort Options
Publication Development of a reduced cleaning process for application in a spray processor
Proceedings paper1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.149-52Publication Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
Proceedings paper1996, Proceedings of the Fourth International Symposium on Cleaning technology in Semiconductor Device Manufacturing, 9/10/1995, p.284-291Publication Light point defect generation during photoresist spin coating
Journal article1997, J. Electrochem. Soc., (144) 10, p.3608-3613Publication Photoresist filtration performance of UPE and PTFE filters
Proceedings paper1996, Proceedings of the Institute of the Environmental Sciences: 42nd Annual Technical Meeting, 12/05/1996, p.259-267Publication Point of use HF purification for Si surface preparation
Proceedings paper1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.131-134Publication Point of use HF purification for silicon surface preparation by ion exchange
Journal article1997, Journal of the Electrochemical Society, (144) 6, p.2189-2196Publication Post metal etch polymer removal: an investigation of the cleaning to remove residual of Si-C and Si-F after fluorocarbon plama etch on the silicon surface
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Post metal etch polymer removal: an investigation of the cleaning to remove residual of Si-C and Si-F after fluorocarbon plama etch on the silicon surface
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.283-286Publication Silicon surface roughening in an iron contaminated SCl bath
Proceedings paper1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.103-106Publication Ultra thin gate oxide technology and reliability
Proceedings paper1996, Proceedings 5th International Symposium on Semiconductor Manufacturing - ISSM, 2/10/1996, p.208-211