Browsing by Author "Muller, Ch."
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Publication A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling
; ; Maes, DavidJournal article2005-04, IEEE Trans. Electron Devices, (52) 4, p.447-453Publication Apport du rayonnement synchrotron à l'analyse de réseaux de condensateurs ferroélectriques integers
Oral presentation2004, Journées Couches Ferroelectriques JCFPublication Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitors
Proceedings paper2005, Proceedings 1st International Conference on Memory Technology and Design, 21/05/2005, p.163-166Publication Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors
Journal article2005-09, Journal of Applied Physics, (98) 5, p.054507-1-054507-7Publication Degradation and recovery of polarization under synchrotron x rays in SrBi2Ta2O9 ferroelectric capacitors
; Publication Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
Journal article2007-01, Journal of Applied Physics, (101) 1, p.14908Publication Failure analysis of FeCAPs. Electrical behaviour under synchrotron X-ray irradiation
Publication Integration of resistive switching NiO in small via structures from localized oxidation in nickel metallic layer
Proceedings paper2008, 38th European Solid-State Device Research Conference - ESSDERC, 15/09/2008, p.218-221Publication Microstructural characterization of side walls in SBT 3D capacitors
Oral presentation2004, 16th International Symposium on Integrated FerroelectricsPublication MOCVD of SBT from fluorine containing precursor system: microstructure optimization and fluorine elimination
Publication NiO resistive switching material integrated at the bottom of via holes from localized oxidation of nickel metallic layer
Oral presentation2009, 18th Workshop Materials for Advanced Metallization - MAMPublication Radiation hardness of SBT-based ferroelectric capacitors
Oral presentation2003, 7th European Conference on Radiation and Its Effects on Components and Systems - RADECSPublication Side walls contribution in integrated 3D SBT-based capacitors: electrical and microstructural point of view
Oral presentation2004, E-MRS Spring Meeting Symposium D: Functional Oxides for Advanced Semiconductor TechnologiesPublication Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors
Journal article2005, Applied Physics Letters, (87) 7, p.073502-1-073502-3Publication Solution growth of metal-organic complex CuTCNQ in small dimension interconnect structures
Journal article2010, Journal of Crystal Growth, (312) 22, p.3267-3275