Browsing by Author "Naka, N."
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Publication Elastic relaxation evaluation in SiGe/Si hetero-epitaxial structures
Meeting abstract2011, 220th Electrochemical Society Fall Meeting Symposium E9: ULSI Process Integration 7, 9/10/2011, p.2129Publication Elastic relaxation evaluation in SiGe/Si hetero-epitaxial structures
Proceedings paper2011, ULSI Process Integration 7, 9/10/2011, p.181-189Publication Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
Journal article2011, Microelectronic Engineering, (88) 4, p.484-487Publication Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
Publication Evaluation of electron irradiated SiGe/Si diodes by Raman spectroscopy
Meeting abstract2010, 9th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications - RASEDA, 27/10/2010Publication Strain evaluation of electron irradiated SiGe/Si diodes by Raman spectroscopy
Proceedings paper2010, 2nd Semiconductor Materials and Devices Forum - SMDF-2, 11/12/2010, p.68-71Publication Stress analysis of Si1-xGex embedded source/drain junctions
Journal article2008, Materials Sicience in Semiconductor Processing, (11) 5, p.285-290