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Browsing by Author "Nauwelaerts, Sophie"

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    Advanced characterization of high-K materials: a nuclear approach

    Brijs, Bert
    ;
    Huyghebaert, Cedric  
    ;
    Nauwelaerts, Sophie
    ;
    Caymax, Matty  
    ;
    Vandervorst, Wilfried  
    Journal article
    2002, Nuclear Instruments & Methods in Physics Research B, 190, p.505-509
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    Advanced RBS analysis of thin films in micro-electronics

    Brijs, Bert
    ;
    Deleu, Jeroen
    ;
    Huyghebaert, Cedric  
    ;
    Nauwelaerts, Sophie
    ;
    Nakajima, K.
    ;
    Kimura, K.
    Proceedings paper
    2001, Application of Accelerators in Research and Industry: Sixteenth International Conference; Denton, TX, USA, 1-5 Nov 2000., p.470-475
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    Advanced RBS analysis of thin films in micro-electronics

    Brijs, Bert
    ;
    Deleu, Jeroen
    ;
    Huygebaert, C.
    ;
    Nauwelaerts, Sophie
    ;
    Vandervorst, Wilfried  
    Oral presentation
    2000, 16th International Conference on the Application of Accelerators in Research and Industry - CAARI; 1-4 November 2000; Denton, TX
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    Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD

    Brijs, Bert
    ;
    Huyghebaert, Cedric  
    ;
    Nauwelaerts, Sophie
    ;
    Caymax, Matty  
    ;
    Vandervorst, Wilfried  
    Oral presentation
    2001, 15th International Conference on Ion Beam Analysis (IBA); July 2001; Cairns, Australia.

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