Browsing by Author "Nicolaides, Lena"
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Publication Advances in optical carrier profiling through high-frequency modulated optical reflectance
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.310-316Publication Advances in optical carrier profiling through high-frequency modulated optical reflectance
Proceedings paper2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling, 6/05/2007, p.71-81Publication Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Meeting abstract2008, E-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008Publication Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Journal article2008, Materials Science & Engineering B, 154-155, p.234-239Publication Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology
Proceedings paper2009, 17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2009Publication Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C1-C1C7Publication Study of sub-melt laser damage annealing using Therma-Probe
Proceedings paper2009, 17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2009Publication Study of sub-melt laser induced junction non-uniformities using Therma-Probe
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009, p.218-224Publication Study of submelt laser induced junction nonuniformities using Therma-Probe
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C21-C1C26Publication Towards non-destructive carrier depth profiling
Proceedings paper2005, 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors, 5/06/2005