imec Institutional Repository Browsing {{ collection }} by Author "Nouri, F."

Publication

Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS

Kraus, P.A.

;

Chua, T.C.

;

Ahmed, K.Z.

;

Campbell, J.

;

Nouri, F.

;

Cruise, J.

;

Rothschild, Aude

Journal article

2004, Semiconductor Fabtech, 23, p.73-76

Publication

High performance & CMOS integration friendly dual metal gate MOSFETs using TaN/Ru or TaN/W/Ru stacking multi-layers on HfLaO gate dielectric

Wang, X.P.

;

Li, M.F.

;

Yu, HongYu

;

Yang, J.J.

;

Loh, W.Y.

;

Zhu, C.X.

;

Du, A.Y.

;

Trigg, A.D.

;

Zhang, G.

Proceedings paper

2007, International Conference on Solid State Devices and Materials - SSDM, 18/09/2006

Publication

Leakage current control in recessed SiGe source/drain junctions

Claeys, Cor

;

Bargallo Gonzalez, Mireia

;

Eneman, Geert

;

Verheyen, Peter

;

Bender, Hugo

Journal article

2007, Journal of the Electrochemical Society, (154) 9, p.H814-H821

Publication

Study of dopant diffusion and defect evolution for advanced ultra shallow junctions based on atomistic kinetic monte carlo approach

Noda, T.

;

Vandervorst, Wilfried

;

Felch, S.

;

Parihar, V.

;

Vrancken, Christa

;

Severi, Simone

Proceedings paper

2007, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 18/09/2007, p.712-713

Publication

Study of Ni-Silicide contacts to Si:C source/drain

Cho, Moon Ju

;

Nouri, F.

;

Schreutelkamp, Rob

;

Kim, Y.

;

Mertens, Sofie

;

Verheyen, Peter

Journal article

2007, Semiconductor Fabtech, 34, p.92-98

Publication

Study of pulsed RF DPN process parameters for 65 nm node MOSFET gate dielectrics

Rothschild, Aude

;

Kraus, P.A.

;

Chua, T.C.

;

Nouri, F.

;

Cubaynes, Florence

;

Veloso, Anabela

Proceedings paper

2004, Integration of Advanced Micro- and Nanoelectronic Devices - Critical Issues and Solutions, 10/04/2004, p.49-53

Browsing by Author "Nouri, F."