Browsing by Author "Parac-Vogt, Tatjana"
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Publication Characterization of 248nm deep ultraviolet (DUV) photoresist after ion implantation
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2077Publication Degradation of 248nm deep UV photoresist by ion implantation
Journal article2011, Journal of the Electrochemical Society, (158) 8, p.H785-H794Publication Non-oxidizing solvent-based strip of ion implanted photoresist
Meeting abstract2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Surfaces, 20/09/2010Publication Non-oxidizing solvent-based strip of ion implanted photoresist
Journal article2012, Solid State Phenomena, 187, p.97-100Publication Removal of high-dose ion-implanted 248nm deep UV photoresist using UV irradiation and organic solvent
Journal article2011, Journal of the Electrochemical Society, (158) 2, p.H150-H155