Browsing by Author "Petersen, D.H."
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Publication Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.362-367Publication Electrical resistance measurements of individual nanometer-wide Si fins
Meeting abstract2017, EMRS Fall Meeting Symposium M: Material and device integration on silicon for advanced applications, 18/09/2017, p.M.LM.11Publication Impact of Sn on Ga activation in heteroepitaxial Ge1-xSnx layer
Proceedings paper2012, 59th Spring Meeting of the Japan Society of Applied Physics, 15/03/2012Publication Micro-uniformity during laser anneal: metrology and physics
Proceedings paper2008, Doping Engineering for Front-End Processing, 24/03/2008, p.1070-E01-10Publication Mobility and carrier concentration measurements on nm-wide semiconductor fins
Meeting abstract2018-06, E-MRS Spring Meeting Symposium I: Materials Research for Group IV Semiconductors: Growth, Characterization and Technological ..., 18/06/2018, p.I.15.3Publication On the activation mechanisms of sub-melt laser anneals
Meeting abstract2008, E-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008Publication Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition
Journal article2011, Applied Physics Letters, (99) 15, p.152103