Browsing by Author "Pirkl, Alexander"
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Publication A holistic approach of SIMS analysis for advanced semiconductor structures
Proceedings paper2019, SIMS 22 - 22nd International Conference on Secondary Ion Mass Spectrometry, 20/10/2019Publication Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with self-focusing SIM
Proceedings paper2019, Festkörperanalytik - Conference on Solid State Analysis, 1/07/2019Publication Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
Proceedings paper2019, ECASIA (European Conference on Applications for Surface and Interface Analysis), 15/09/2019Publication New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry
Oral presentation2020, Microscopy & Microanalysis 2020 MeetingPublication SIMS Analysis of Thin EUV Photoresist Films
Journal article2022, ANALYTICAL CHEMISTRY, (94) 5, p.2408-2415Publication Surface analysis in the semiconductor industry: Present use and future possibilities
Journal article2020, Surface and Interface Analysis, (52) 12, p.786-791Publication Thin photoresist layers for microelectronic devices: a comparative study between ToF and Orbitrap™ mass analyzers.
Oral presentation2019, SIMS 22