Browsing by Author "Romo Negreira, Ainhoa"
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Publication Can carbon nanotubes be preserved during FIB preparation of TEM samples?
Proceedings paper2008, 4th European FIB & DualBeam User Club Meeting, 7/04/2008Publication Carbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB?
Proceedings paper2008-09, 14th European Microscopy Congress, 1/09/2008, p.673-674Publication Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Oral presentation2012, MRS Fall M eeting Symposium S: Directed Self-Assembly for NanopatterningPublication Electrochemical tailoring of catalyst nanoparticles for CNT spactial-dimension control
Journal article2010, Journal of the Electrochemical Society, (157) 3, p.K47-K51Publication Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control
Proceedings paper2014, Alternative Lithographic Technologies VI, 23/02/2014, p.90491LPublication From 2D to 3D: FIB sample preparation for carbon nanotube interconnects
Proceedings paper2010, 17th International Microscopy Congress, 20/09/2010Publication Growth and characterization of horizontally suspended CNTs across TiN electrode gaps
Journal article2010, Nanotechnology, (21) 24, p.245604Publication Growth and electrical characterization of horizontally aligned CNTs
Proceedings paper2009, 7th ISTC/CISC, 17/03/2009, p.845-850Publication Growth and integration of high-density CNT for advanced interconnects
Meeting abstract2008, 14th International Conference on Solid Films and Surfaces - ICSFS, 29/06/2008, p.182-183Publication Growth and integration of high-density CNT for BEOL interconnects
Proceedings paper2008, Materials and Processes for Advanced Interconnects for Microelectronics, 24/03/2008, p.1079-N06-01Publication High density aligned CNT Arrays
Oral presentation2007, European Congress and Exhibition on Advanced Mateirals and Processes - EuromatPublication Integration of carbon nanotubes for advanced interconnects
Meeting abstract2008, E-MRS Spring Meeting Symposium J: Beyond Silicon Technology: Materials and Devices for Post -Si CMOS, 26/05/2008Publication Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD
Meeting abstract2009, 215th Electrochemical Society Spring Meeting, 24/05/2009, p.969Publication Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing
Journal article2017, Microelectronic Engineering, 137, p.32-36Publication Optimization of multi-walled carbon nanotube-metal contacts by electrical stressing
Journal article2010, Nanotechnology, (21) 4, p.45705Publication Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration
Proceedings paper2013, Alternative Lithographic Technologies V, 24/02/2013, p.86801HPublication Progress in directed self-assembly hole shrink applications
Proceedings paper2013, Advances in Resist Materials and Processing Technology XXX, 25/02/2013, p.86820LPublication Readying directed self-assembly for patterning in semiconductor manufacturing
Meeting abstract2014, 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN, 27/05/2014Publication Rectification of EUV-patterned contact holes using directed self-assembly
Proceedings paper2013, Advances in Resist Materials and Processing Technology XXX, 25/02/2013, p.86820A