Browsing by Author "Rudra, Sukumar"
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Publication A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator
Journal article2013, Microelectronic Engineering, 105, p.8-12Publication Diffractive micro-electromechanical structures in Si and SiGe
Rudra, SukumarPHD thesis2013-08Publication Grating light valves
Rudra, SukumarOral presentation2010, 11de UGent-FirW DoctoraatssymposiumPublication Grating light valves: a SiGe based approach towards monolithic integration of MOEMS
Proceedings paper2009, LEOS: 14th Annual Symposium of the IEEE Photonics Chapter Benelux, 5/11/2009, p.109-112Publication SiGe based grating light valves: a leap towards monolithic integration of MOEMS
Journal article2010, Microelectronic Engineering, (87) 5_8, p.1195-1197Publication SiGe MEMS technology: a platform technology enabling different demonstrators
Meeting abstract2010, 218th ECS Conference, 10/10/2010, p.1937Publication SiGe MEMS technology: a platform technology enabling different demonstrators
Proceedings paper2010, SiGe, Ge, and Related Compounds 4: Materials, Processing and Devices, 10/10/2010, p.799-812Publication SiGe-based Grating Light Valve: A leap towards monolithic integration of MOEMS
Meeting abstract2009, 35th International Conference on Micro- and Nano Engineering - MNE, 28/09/2009Publication Static and dynamic characterization of poly-SiGe grating light valves
Proceedings paper2011, 16th International Conference on Optical MEMS and Nanophotonics - OMN, 8/08/2011, p.203-204Publication Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
Journal article2012, Sensors and Actuators A: Physical, 179, p.283-290Publication Temporary 0-level MEMS packaging using a heat decomposable sealing ring
Proceedings paper2011, Eurosensors XXV, 4/09/2011, p.1497-1500