Browsing by Author "Sajavaara, Timo"
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Publication ARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysis
Oral presentation2004, 8th European Conference on Accelerators in Applied Research and TechnologyPublication Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Publication Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films
Publication Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films
Journal article2008, Nuclear Instruments and Methods in Physics Research B, (266) 24, p.5144-5150Publication Nanoprober as a tool for electrical measurements of nanostructures
Oral presentation2010, Physics Days, the 44th Annual Meeting of the Finnish Physical SocietyPublication Nanoscale etching of GaAs and InP in acidic H2O2 solution: a striking contrast in kinetics and surface chemistry
Proceedings paper2018, Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS, 2/09/2018, p.48-51Publication Nanoscale etching of III-V semiconductors in acidic hydrogen peroxide solution: GaAs and InP, a striking contrast
Journal article2019, Applied Surface Science, 465, p.596-606Publication Particle-induced X-ray emission in the analysis of GeCu thin films and photoresists containing As impurities
Meeting abstract2014, Physics Days. The 48th Annual Meeting of the Finnish Physical Society, 11/03/2014Publication Pitfalls in heavy ion ERD measurements
Publication Study of thermal stability of nickel silicide by x-ray reflectivity
Journal article2005, Microelectronic Engineering, (82) 3_4, p.492-496Publication The analysis of ultra-thin films with HRBS-30
Proceedings paper2010, 21st International Conference on the Application of Accelerators in Research and Industry - CAARI, 8/08/2010