Browsing by Author "Schneider, Dieter"
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Publication Effect of pore structure of nanometer scale porous films on the measured elastic modulus
Journal article2013, Langmuir, (29) 38, p.12025-12035Publication Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films
Meeting abstract2012, Materials for Advanced Metallization - MAM, 11/03/2012, p.O3-01Publication Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics
Meeting abstract2013, MRS Spring Meeting - Symposium AA: Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability, 1/04/2013, p.AA3.05Publication Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films
Journal article2008, Physica Status Solidi C, (5) 5, p.1253-1256Publication Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Publication Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves