Browsing by Author "Shaughnessy, Derrick"
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Publication Advances in optical carrier profiling through high-frequency modulated optical reflectance
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.310-316Publication Advances in optical carrier profiling through high-frequency modulated optical reflectance
Proceedings paper2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling, 6/05/2007, p.71-81Publication Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Journal article2008, Materials Science & Engineering B, 154-155, p.234-239Publication Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Meeting abstract2008, E-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008Publication Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C1-C1C7Publication Theory of photomodulated optical reflectance on active doping profiles in silicon
Meeting abstract2009, 15th International Conference on Photoacoustics and Photothermal Phenomena - ICPPP15, 19/07/2009Publication Transfer from Rs-based to PMOR-based ion implantation process monitoring
Proceedings paper2011, Ion Implantation Technology 2010. 18th International Conference, 6/06/2010, p.426-431