imec Institutional Repository Browsing {{ collection }} by Author "Smirnov, Evgeny"

Publication

Evaluation of a new advanced low-k material

Smirnov, Evgeny

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Vanstreels, Kris

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Verdonck, Patrick

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Ciofi, Ivan

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Shamiryan, Denis

Journal article

2011, Japanese Journal of Applied Physics, 50, p.05EB03

Publication

First evaluation of new advanced SOG 2.0 low-k material

Smirnov, Evgeny

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Vanstreels, Kris

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Verdonck, Patrick

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Shamiryan, Denis

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Baklanov, Mikhaïl

Meeting abstract

2010, Advanced Metallization Conference; 20th Asian Session - ADMETA, 19/10/2010

Publication

Impact of plasma exposure on organic low-k materials

Smirnov, Evgeny

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Ferchichi, Abdelkarim

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Huffman, Craig

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Baklanov, Mikhaïl

Proceedings paper

2010, International Conference on Micro- and Nanoelectronics 2009, 5/10/2009, p.752107

Publication

Plasma damage and restoration of CVD low-k materials

Smirnov, Evgeny

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Ferchichi, Abdelkarim

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Zhao, Larry

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Baklanov, Mikhaïl

Meeting abstract

2009, International Conference Micro- and Nanoelectronics - ICMNE, 5/10/2009, p.P2-31

Publication

Plasma sealing of advanced organic low-k material

Smirnov, Evgeny

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Pantouvaki, Marianna

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Huffman, Craig

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Vanstreels, Kris

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Baklanov, Mikhaïl

Oral presentation

2011, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM

Publication

The effect of He plasma treatment on properties of organosilicate glass low-k films

Braginsky, O.V.

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Kovalev, A.S.

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Lopaev, D.V.

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Malykhin, E.M.

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Mankelevich, Y.A.

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Proshina, O.V.

Journal article

2011, Journal of Applied Physics, (109) 4, p.43303

Publication

Ultra low dielectric constant materials for 22 nm technology node and beyond

Baklanov, Mikhaïl

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Smirnov, Evgeny

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Zhao, Larry

Proceedings paper

2011, Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11, 1/05/2011, p.717-728

Publication

Ultra low dielectric constant materials for 22 nm technology node and beyond

Baklanov, Mikhaïl

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Smirnov, Evgeny

;

Zhao, Larry

Meeting abstract

2011, 219th ECS Meeting, 1/05/2011, p.1407

Browsing by Author "Smirnov, Evgeny"