Browsing by Author "Socha, Robert"
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Publication Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells
Journal article2011-03, Journal of Micro/Nanolithography MEMS and MOEMS, (10) 1, p.13008Publication Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.764008Publication Freeform illumination sources: Source mask optimization for 22 nm node SRAM
Proceedings paper2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009Publication Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems
Publication Through pitch low-k1 contact hole imaging with CPL(TM) technology
Journal article2004, Photomask, BACUS News, (20) 12, p.1-11Publication Through pitch low-k1 contact hole imaging with CPLTM technology
Proceedings paper2004, Photomask and Next-Generation Lithography Mask Technology XI, 14/04/2004, p.585-594