Browsing by Author "Tabata, Toshiyuki"
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Publication 3D simulation for melt laser anneal integration in FinFET's contact
Publication Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments
Meeting abstract2019, 2019 E-MRS Fall Meeting, 16/09/2019Publication Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Segregation and activation of Sb implanted in Si by UV nanosecond-laser-anneal-induced non-equillibrium solidification
Publication UV nanosecond laser annealing for Ru interconnects
Proceedings paper2020, 23rd IEEE INternational Interconnect Technology Conference - IITC, 5/10/2020, p.FrBT2.6