Browsing by Author "Tillack, Bernd"
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Publication Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth
Meeting abstract2017-05, ULSIC vs TFT: 6th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film T, 21/05/2017Publication Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth
Proceedings paper2017-05, ULSIC vs TFT: 6th Int Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, 21/05/2017, p.33-42Publication Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth
Journal article2018-05, ECS Journal of Solid State Science and Technology, (7) 6, p.P305-P310Publication Atomically controlled processing for Ge CVD epitaxial growth
Proceedings paper2016, IEEE 13th International Conference on Solid-State and Integrated-Circuit Technology - ICSICT, 25/10/2016, p.317-320Publication Atomically controlled processing for in-situ doping in CVD Si and Ge epitaxial growth
Meeting abstract2017-07, 1st International Semiconductor Conference for Global Challenges - ISCGC, 16/07/2017Publication Atomically controlled processing for Si and Ge CVD epitaxial growth
Meeting abstract2016, 229th ECS Meeting: Symposium D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing, 29/05/2016, p.988Publication Atomically controlled processing for Si and Ge CVD epitaxial growth
Proceedings paper2016, Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing, 29/05/2016, p.71-82Publication Dopant segregation and diffusion in CVD epitaxial Grown Ge
Publication Dopant segregation and diffusion in CVD epitaxial grown germanium
Publication Dopant segregation in Si and Ge CVD epitaxial growth
Meeting abstract2016-11, 8th International Workshop on Advanced Materials Science and Nanotechnology - IWAMSN, 8/11/2016, p.33-34Publication Dopant segregation in Si and Ge CVD epitaxial growth
Meeting abstract2016, JSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration", 24/11/2016, p.7-8Publication EI4GroupIV: Excellence initiative for new group IV semiconductor materials & processing
Oral presentation2016, INC Global Nanotechnology ConferencePublication EI4GroupIV: Excellence Initiative for New Group IV semiconductor materials & processing
Meeting abstract2016, JSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration", 24/11/2016, p.58-59Publication Photoluminescence of phosphorus atomic layer doped Ge grown on Si
Publication Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth