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Browsing by Author "Van Meirhaeghe, R. L."

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    A ballistic electron emission microscopy (BEEM) study of the barrier height change of Au/n-GaAs Schottky barriers due to reactive ion etching

    Vanalme, G. M.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Van Daele, Peter  
    Journal article
    1997, Semiconductor Science and Technology, 12, p.907-912
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    A ballistic electron emission microscopy (BEEM)-investigation of the effects of reactive ion etching (RIE) and of chemical pretreatment on III-V semiconductors

    Van Meirhaeghe, R. L.
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    Vanalme, G. M.
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    Goubert, L.
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    Cardon, F.
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    Van Daele, P.
    Proceedings paper
    1997, Microscopy of Semiconducting Materials 1997, 7/04/1997, p.619-622
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    A ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/III-V semiconductor Schottky barrier contacts by chemical pretreatments

    Vanalme, G. M.
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    Goubert, L.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Van Daele, Peter  
    Journal article
    1999, Semiconductor Science and Technology, (14) 9, p.871-877
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    A BEEM study of PtSi Schottky contacts on ion-milled Si

    Ru, Guo-Ping
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    Detavernier, C.
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    Alves Donaton, Ricardo
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    Blondeel, A.
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    Clauws, P.
    Proceedings paper
    1999, Advanced Interconnects and Contacts, 5/04/1999, p.201-206
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    A study of electrically active defects created in p-InP by CH4:H2 reactive ion etching

    Goubert, L.
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    Van Meirhaeghe, R. L.
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    Clauws, P.
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    Cardon, F.
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    Van Daele, Peter  
    Journal article
    1997, Journal of Applied Physics, (82) 4, p.1696-1699
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    An XPS study of the effects of semiconductor processing treatments used to make InP optoelectronic devices

    Van Meirhaeghe, R. L.
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    Goubert, L.
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    Fiermans, L.
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    Laflère, W. H.
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    Cardon, F.
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    De Dobbelaere, Peter
    Proceedings paper
    1995, Microscopy of Semiconducting Materials 1995, 20/03/1995, p.641-644
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    Controlling CoSi2 nucleation: the effect of entropy of mixing

    Detavernier, C.
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    Van Meirhaeghe, R. L.
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    Maex, Karen  
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    Cardon, F.
    Proceedings paper
    2001, Gate Stack and Silicide Issues in Silicon Processing, 24/04/2000, p.C7.9.1-C7.9.6
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    Controlling CoSi2 nucleation: the effect of entropy of mixing

    Detavernier, C.
    ;
    Van Meirhaeghe, R. L.
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    Maex, Karen  
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    Cardon, F.
    Oral presentation
    2000, MRS Spring Meeting Symposium: Gate stack and silicide issues in silicon processing; 2000;
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    CoSi2 formation in the presence of interfacial silicon oxide

    Detavernier, C.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Donaton, R. A.
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    Maex, Karen  
    Journal article
    1999, Appl. Phys. Lett., (74) 20, p.2930-32
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    CoSi2 formation in the Ti/Co/SiO2/Si system

    Detavernier, C.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Maex, Karen  
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    Bender, Hugo  
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    Zhu, S. Y.
    Journal article
    2000, J. Appl. Physics, (88) 1, p.133-140
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    CoSi2 formation through SiO 2

    Detavernier, C.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Maex, Karen  
    Journal article
    2001, Thin Solid Films, (386) 1, p.19-26
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    Determination of tunnelling parameters in ultra-thin oxide poly-Si/SiO2/Si structures

    Depas, Michel
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    Vermeire, Bert
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    Mertens, Paul  
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    Van Meirhaeghe, R. L.
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    Heyns, Marc  
    Journal article
    1995, Solid-State Electronics, (38) 8, p.1465-1471
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    Epitaxial CoSi2 formation by a Cr or Mo interlayer

    Detavernier, C.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Maex, Karen  
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    Brijs, Bert
    Proceedings paper
    2000, Gate Stack and Silicide Issues in Silicon Processing, p.C10.2
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    Formation of epitaxial CoSi2 by a Cr or Mo interlayer: comparison with a Ti interlayer

    Detavernier, C.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Maex, Karen  
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    Bender, Hugo  
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    Brijs, Bert
    Journal article
    2001, Journal of Applied Physics, (89) 4, p.2146-2150
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    Influence of mixing entropy on the nucleation of CoSi2

    Detavernier, C.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Maex, Karen  
    Journal article
    2000, Physical Review B, (62) 18, p.12045-12051
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    Influence of Ti on CoSi2 nucleation

    Detavernier, C.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Maex, Karen  
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    Vandervorst, Wilfried  
    Journal article
    2000, Applied Physics Letters, (77) 20, p.3170-3172
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    Ion-bombardment effects on PtSi/n-Si Schottky contacts studied by ballistic electron emission microscopy

    Ruttens, Gerlinde
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    Qu, X. P.
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    Zhu, S. Y.
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    Li, Bing-Zong
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    Detavernier, C.
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    Van Meirhaeghe, R. L.
    Journal article
    2000, J. Vacuum Science and Technology B, (18) 4, p.1942-1948
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    Nondestructive characterization of thin silicides using x-ray reflectivity

    Detavernier, C.
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    De Gryse, R.
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    Van Meirhaeghe, R. L.
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    Cardon, F.
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    Ru, Guo-Ping
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    Qu, Xin-Ping
    Journal article
    2000, J. Vacuum Science and Technology A, (A18) 2, p.470-476
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    Orientation dependent stress build-up during the formation of epitaxial CoSi2

    Steegen, An
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    Detavernier, C.
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    Maex, Karen  
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    Van Meirhaeghe, R. L.
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    Cardon, F.
    Oral presentation
    2000, Materials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy.
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    Orientation-dependent stress build-up during the formation of epitaxial CoSi2

    Steegen, An
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    Detavernier, C.
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    Lauwers, A.
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    Maex, Karen  
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    Van Meirhaeghe, R. L.
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    Cardon, F.
    Journal article
    2001, Microelectronic Engineering, (55) 1_4, p.145-150
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