Browsing by Author "Van den Heuvel, Dieter"
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Publication Detection of bonding voids for 3D integration
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124961BPublication Dry Resist Metrology Readiness for High-NA EUVL
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 1249612Publication Enabling 0.33NA EUV lithography patterning towards MP16 SADP semi-damascene metallization, setting the benchmark for High-NA EUV
; ; ; ; Van den Heuvel, DieterProceedings paper2024, 2024 International Conference on Extreme Ultraviolet Lithography, SEP 30-OCT 03, 2024Publication High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification
Publication Influence of photoresist thinning and underlayer film on e-beam using eP5 for High-NA patterning
Proceedings paper2022, International Conference on Extreme Ultraviolet Lithography, SEP 26-29, 2022, p.122920M