Browsing by Author "Vemula, Sri Charan"
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Publication Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Oral presentation2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and ModelingPublication Impact of the environmental conditions on the electrical characteristics of scanning spreading resistance microscopy
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.338-341Publication Scanning spreading resistance microscopy for the calibration of process simulators on 65nm MOS technology.
Oral presentation2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and ModelingPublication Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning
Proceedings paper2009, 9th International Workshop on Junction Technology - IWJT, 11/06/2009