Browsing by Author "Verheijen, M."
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Publication Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Oral presentation2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and ModelingPublication Assessing the performance of two-dimensional dopant profiling techniques
Journal article2004, Journal of Vacuum Science and Technology, (22) 1, p.385-393Publication Assessing the performance of two-dimensional dopant profiling techniques
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.215-226Publication Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy
Journal article2004, Journal of Applied Physics, (96) 9, p.4878-4889Publication Pre-amorphization and co-implantation suitability for advanced PMOS devices integration
; ; ; Dachs, CharlesProceedings paper2003, Extended Abstracts of the 2003 International Conference on Solid State Device and Materials, 16/09/2003, p.740-741