Browsing by Author "Voronina, Ekaterina"
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Publication Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films
Journal article2020, ACS Applied Materials & Interfaces, (12) 4, p.4678-4688Publication Area-selective Ru ALD by amorphous carbon modification using H plasma: from atomistic modeling to full wafer process integration
Journal article2020, MATERIALS ADVANCES, (1) 8, p.3049-3057Publication Dry cleaning and doping of MX2 for contact engineering
Meeting abstract2018, AVS 65th International Symposium & Exhibition, 21/10/2018Publication Mechanisms of hydrogen atom interactions with MoS2 monolayer
Publication Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers
Journal article2021, NPJ 2D MATERIALS AND APPLICATIONS, (5) 1, p.17Publication Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes
Meeting abstract2019, PESM2019, 20/05/2019