Browsing by Author "Wang, Wan-Chih"
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Publication Direct physical evidence of mechanisms of leakage and equivalent oxide thickness reduction in metal-insulator-metal capacitors based on RuOx/TiOx/SrxTiyOz/TiN stacks
Journal article2012, Applied Physics Letters, (101) 4, p.42901Publication Effect of the composition on the bandgap width of high-k MexTiyOz (Me=Hf,Ta, Sr)
Journal article2011, Thin Solid Films, (519) 17, p.5730-5733Publication Enabling 3X nm DRAM: Record low leakage 0.4 nm EOT MIM capacitors with novel stack engineering
Proceedings paper2010, IEEE International Electron Devices Meeting - IEDM, 6/12/2010, p.277-280Publication Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
Journal article2010, IOP Conference Series: Materials Science and Engineering, (8) 1, p.12023Publication Towards 1X DRAM: Improved leakage 0.4 nm EOT STO-based MIMcap and explanation of leakage reduction mechanism showing further potential
Proceedings paper2011, Symposium on VLSI Technology, 13/06/2011, p.168-169