Browsing by Author "Word, James"
Now showing 1 - 7 of 7
- Results per page
- Sort Options
Publication 3D Mask modeling for EUV lithography
Proceedings paper2012, Extreme Ultraviolet (EUV) Lithography III, 12/02/2012, p.832224Publication Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography
Publication Directed self-assembly graphoepitaxy template generation with immersion lithography
Publication Experimental determination and accurate modeling of the EUV ADT flare
Proceedings paper2009, International Symposium on Extreme Ultraviolet Lithography, 18/10/2009Publication Feasibility of compensating for EUV field edge effects through OPC
Proceedings paper2014, Extreme Ultraviolet (EUV) Lithography V, 23/02/2014, p.90480TPublication Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration
Journal article2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 4, p.41505Publication Model based OPC for 1st generation 193-nm lithography
Proceedings paper2001, Optical Microlithography XIV, 27/02/2001, p.119-130