Browsing by Author "van Spengen, Merlijn"
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Publication A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
Journal article2004, Journal of Micromechanics and Microengineering, (14) 4, p.514-521Publication A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches
Journal article2003-05, J. Micromechanics and Microengineering, (13) 13, p.604-612Publication A physical model to predict stiction in MEMS
Journal article2002, Journal of Micromechanics and Microengineering, (12) 5, p.702-713Publication A reliable and compact polymer-based package for capacitive RF-MEMS switches
Proceedings paper2004-12, Technical Digest International Electron Device Meeting - IEDM, 13/12/2004, p.31-34Publication An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness
Proceedings paper2000, Materials and Device Characterization in Micromachining III, 17/09/2000, p.104-112Publication Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations
Journal article2004, Microsystems Technologies, (10) 2, p.89-96Publication Experimental characterization of stiction due to charging in RF MEMS
Proceedings paper2002, IEDM Technical Digest, 9/12/2002, p.901-904Publication Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy
Proceedings paper2000, Materials and Device Characterization in Micromachining III, 17/09/2000, p.132-139Publication High resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy
Proceedings paper1999, Advanced Photonic Sensors and Applications, 30/11/1999, p.239-252Publication High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution
Proceedings paper2001, Reliability, Testing, and Characterization of MEMS/MOEMS, p.268-277Publication MEMS reliability from a failure mechanisms
van Spengen, MerlijnJournal article2003, Microelectronics Reliability, (43) 7, p.1049-1060Publication MEMS reliability. Stiction, charging, and RF MEMS
van Spengen, MerlijnPHD thesis2004-05Publication Methodology to assess the reliability behavior of RF MEMS
; ; Publication On the physics of stiction and its impact on the reliability of microstructures
Journal article2003, Journal of Adhesion Science and Technology, (17) 4, p.563-582Publication Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)
Proceedings paper2001, Proceedings of the 27th International Symposium for Testing and Failure Analysis - ISTFA, 11/11/2001, p.357-364Publication Optical methods for the reliability and failure analysis of RF MEMS
Publication Reliability and failure analysis of microsystems
Proceedings paper2004, Proceedings of the 9th International Conference on the Commercialization of Micro and Nano Systems - COMS, 29/08/2004, p.297-301Publication Reliability and failure analysis of RF MEMS switches
Proceedings paper2002, Proceedings 28th International Symposium for Testing and Failure Analysis - ISTFA, 7/11/2002, p.275-281Publication Reliability of RF-MEMS
Proceedings paper2003, Abstracts Book and Programme 4th Round Table on Micro/Nano Technologies for Space, 20/05/2003, p.55