Browsing by author "Rio, David"
Now showing items 1-9 of 9
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Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer
De Simone, Danilo; Lyons, Adam; Rio, David; Lee, Sook; Delorme, Maxence; Fumar-Pici, Anita; Kocsis, Michael; De Schepper, Peter; Greer, Michael; Wallow, THomas; Stowers, Jason K; Gillijns, Werner; Bekaert, Joost (2017) -
Design-based metrology: beyond CD/EPE metrics to evaluate printability performance
Halder, Sandip; Mailfert, Julien; Leray, Philippe; Rio, David; Peng, Hsin-Ying; Laenens, Bart (2016) -
Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer
Timoshkov, Vadim; Rio, David; Liu, H.; Gillijns, Werner; Wang, Jing; Wong, Patrick; Van Den Heuvel, Dieter; Wiaux, Vincent; Nikolsky, Peter; Finders, Jo (2013) -
Integrated approach to improving local CD uniformity in EUV patterning
Liang, Andrew; Hermans, Jan; Tran, Tim; Viatkina, Katja; Liang, Chen-Wei; Ward, Brandon; Chuang, Steven; Yu, Jengyi; Harm, Greg; Vandereyken, Jelle; Rio, David; Kubis, Michael; Tan, Samantha; Wise, Rich; Dusa, Mircea; Reddy, Sirish; Singhal, Akhil; Van Schravendijk, Bart; Dixit, Girish; Shamma, Nader (2017) -
Mask Contribution to OPC Model Accuracy
Lyons, Adam; Wallow, Tom; Hennerkes, Christoph; Spence, Chris; Delorme, Max; Rio, David; Tsunoda, Dai; Torigoe, Yohei; Hamaji, Masakazu (2020) -
Model calibration and validation for pre-production EUVL
Lorusso, Gian; Van de Kerkhove, Jeroen; De Bisschop, Peter; Hendrickx, Eric; Jiang, J.; Rio, David; Liu, W.; Liu, H. (2012) -
NXE:3400 OPC Process Monitoring: Model Validity vs. Process Variability
Xu, Dongbo; Rio, David; Gillijns, Werner; Delorme, Max; Baerts, Christina (2021-02-22) -
OPC resist model separability validation after SMO source change
Gillijns, Werner; Van de Kerkhove, Jeroen; Trivkovic, Darko; De Bisschop, Peter; Rio, David; Hsu, Stephen; Feng, Mu; Zang, Qiang; Liu, Hua-Yu (2013) -
Standard cell design in N7: EUV vs. immersion
Chava, Bharani; Rio, David; Sherazi, Yasser; Trivkovic, Darko; Gillijns, Werner; Debacker, Peter; Raghavan, Praveen; Elsaid, Ahmad; Dusa, Mircea; Mercha, Abdelkarim; Ryckaert, Julien; Verkest, Diederik (2015)