Browsing by author "Liu, Yefan"
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Characterization of Impact of Vertical Stress on FinFETs
Furuhashi, Takahisa; Haneda, Masaki; Sasaki, Toru; Kagawa, Yoshihisa; Ooka, Yutaka; Hirano, Tomoyuki; Ohno, Keiichi; Iwamoto, Hayato; Saito, Masaki; Liu, Yefan; Hiblot, Gaspard; Vanstreels, Kris; Gonzalez, Mario; Velenis, Dimitrios; Beyer, Gerald; Van der Plas, Geert; De Wolf, Ingrid; Beyne, Eric (2019) -
Comparative analysis of the degradation mechanisms in logic and I/O FinFET devices induced by plasma damage
Hiblot, Gaspard; Liu, Yefan; Hellings, Geert; Van der Plas, Geert (2019) -
Electrical characterization of BEOL plasma-induced damage in bulk FinFET technology
Hiblot, Gaspard; Subirats, Alexandre; Liu, Yefan; Van der Plas, Geert (2019) -
Impact of packaging stress on thinned 6T SRAM die
Hiblot, Gaspard; Liu, Yefan; Van der Plas, Geert (2020) -
In-situ investigation of the impact of externally applied vertical stress on III-V bipolar transistor
Liu, Yefan; Hiblot, Gaspard; Gonzalez, Mario; Vanstreels, Kris; Velenis, Dimitrios; Badaroglu, Mustafa; Van der Plas, Geert; De Wolf, Ingrid (2018) -
Investigation of mechanical stress impact on microelectronic devices using a nano-indentation probing system
Liu, Yefan; Hiblot, Gaspard; Gonzalez, Mario; De Wolf, Ingrid (2018) -
Investigation of the Impact of Externally Applied Out-of-Plane Stress on Ferroelectric FET
Liu, Yefan; Clima, Sergiu; Hiblot, Gaspard; Matagne, Philippe; Popovici, Mihaela Ioana; Kaczer, Ben; Velenis, Dimitrios; De Wolf, Ingrid (2021) -
Observation of plasma-induced damage in bulk germanium p-type FinFET devices and curing in high-pressure anneal
Hiblot, Gaspard; Arimura, Hiroaki; Witters, Liesbeth; Chiu, Eddie; Liu, Yefan; Mitard, Jerome; Horiguchi, Naoto; Collaert, Nadine; Van der Plas, Geert (2019) -
Study of out-of-plane mechanical stress impact on Si BJT and diffusion resistor using in-situ nanoindentation probing
Liu, Yefan; Hiblot, Gaspard; Furuhashi, Takahisa; Lin, Hesheng; Velenis, Dimitrios; De Wolf, Ingrid (2019) -
Study of the mechanical stress impact on silicide contact resistance by 4-point bending
Liu, Yefan; Yu, Hao; Hiblot, Gaspard; Kruv, Anastasiia; Schaekers, Marc; Horiguchi, Naoto; Velenis, Dimitrios; De Wolf, Ingrid (2019)