Browsing by author "Rusu, Cristina"
Now showing items 1-10 of 10
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A wet release process for fabricating slender and compliant suspended micro-mechanical structures
Pamidighantam, Sayanu; Laureyn, Wim; Rusu, Cristina; Baert, Kris; Puers, Bob; Tilmans, Harrie (2003) -
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
Rusu, Cristina; Van't Oever, R.; De Boer, M. J.; Jansen, Henri; Berenschot, J. W.; Bennink, M. L.; Kanger, J. S.; De Grooth, B. G.; Elwenspoek, M.; Greve, J.; Brugger, J.; Van Den Berg, A. (2001) -
Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications
Van der Donck, Tom; Proost, Joris; Rusu, Cristina; Baert, Kris; Van Hoof, Chris; Celis, Jean-Pierre; Witvrouw, Ann (2004-01) -
MEMS 0-level packaging using thin film poly-SiGe caps
Rusu, Cristina; Verbist, Agnes; Parmentier, Brigitte; Witvrouw, Ann (2002-09) -
New low-stress PECVD Poly-SiGe layers for MEMS
Rusu, Cristina; Sedky, S.; Parmentier, Brigitte; Verbist, Agnes; Richard, Olivier; Brijs, Bert; Geenen, Luc; Witvrouw, Ann; Lärmer, F.; Fischer, F.; Kronmüller, S.; Leca, V.; Otter, B. (2003) -
Planarization of deep trenches
Rusu, Cristina; Klaasse, Gerard; Sedky, Sherif; Esch, Heleen; Parmentier, Brigitte; Verbist, Agnes; Witvrouw, Ann (2001) -
Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process
Rusu, Cristina; Jansen, Henri; Gunn, Robert (2003) -
Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
Hoechst, A.; Scheuerer, R.; Stahl, H.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Watcham, S.; Rusu, Cristina; Witvrouw, Ann; Gunn, R. (2004) -
Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
Stahl, H.; Hoechst, A.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Breitschwerdt, K.; Gunn, R.; Watcham, S.; Rusu, Cristina; Witvrouw, Ann (2003) -
Zero-level packaging for MEMS
Rusu, Cristina; Jourdain, Anne; Witvrouw, Ann; Tilmans, Harrie (2002-05)