Browsing by author "Inoue, Osamu"
Now showing items 1-9 of 9
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Enabling CD SEM metrology for 5nm technology node and beyond
Lorusso, Gian; Ohashi, Takeyoshi; Yamaguchi, Astuko; Inoue, Osamu; Sutani, Takumichi; Horiguchi, Naoto; Boemmels, Juergen; Wilson, Chris; Briggs, Basoene; Tan, Chi Lim; Raymaekers, Tom; Delhougne, Romain; Van den Bosch, Geert; Di Piazza, Luca; Kar, Gouri Sankar; Furnemont, Arnaud; Fantini, Andrea; Donadio, Gabriele Luca; Souriau, Laurent; Crotti, Davide; Yasin, Farrukh; Appeltans, Raf; Rao, Siddharth; De Simone, Danilo; Rincon Delgadillo, Paulina; Leray, Philippe; Charley, Anne-Laure; Zhou, Daisy; Veloso, Anabela; Collaert, Nadine; Hasumi, Kazuhisa; Koshihara, Shunsuke; Ikota, Masami; Okagawa, Yutaka; Ishimoto, Toru (2017) -
Hybrid overlay metrology for high order correction by using CDSEM
Leray, Philippe; Halder, Sandip; Lorusso, Gian; Baudemprez, Bart; Inoue, Osamu; Okagawa, Yutaka (2016) -
Hybrid overlay metrology with CDSEM in a BEOL patterning scheme
Leray, Philippe; Jehoul, Christiane; Inoue, Osamu; Okagawa, Yutaka (2015) -
Line width roughness accuracy analysis during pattern transfer in self-aligned quadruple patterning process
Lorusso, Gian; Inoue, Osamu; Ohashi, Takeyoshi; Altamirano Sanchez, Efrain; Constantoudis, Vassilios; Koshihara, Shunsuke (2016) -
Precise measurement of thin film thickness in 3D-NAND device with CD-SEM
Ohashi, Takeyoshi; Atsuko, Yamaguchi; Kobayashi, Takashi; Inoue, Osamu; Hasumi, Kazuhisa; Ikota, Masami; Tan, Chi Lim; Van den Bosch, Geert; Lorusso, Gian; Furnemont, Arnaud (2016) -
SEM based overlay measurement between resist and buried patterns
Inoue, Osamu; Okagawa, Yutaka; Hasumi, Kazuhisa; Shao, Chuanyu; Leray, Philippe; Halder, Sandip; Lorusso, Gian; Baudemprez, Bart (2016) -
SEM based overlay measurement between via patterns and buried M1 patterns using high voltage SEM
Hasumi, Kazuhisa; Inoue, Osamu; Okagawa, Yutaka; Shao, Chuanyu; Leray, Philippe; Halder, Sandip; Lorusso, Gian; Jehoul, Christiane (2017) -
Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element
Ohashi, Takeyoshi; Yamaguchi, Atusko; Hasumi, Kazuhisa; Inoue, Osamu; Ikata, Masami; Lorusso, Gian; Donadio, Gabriele Luca; Yasin, Farrukh; Rao, Siddharth; Kar, Gouri Sankar (2017) -
Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Inoue, Osamu; Ikota, Masami; Lorusso, Gian; Donadio, Gabriele Luca; Yasin, Farrukh; Rao, Siddharth; Kar, Gouri Sankar (2017)