Browsing by author "Fouchier, Marc"

Assessing the performance of two-dimensional dopant profiling techniques

Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Alvarez, David; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2003)

Assessing the performance of two-dimensional dopant profiling techniques

Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Álvarez, D.; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Kittler, M.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2004)

Automated assembly of holder chips to AFM probes

Reinhart, Gunther; Jacob, Dirk; Fouchier, Marc (2001)

Characterization of different tip materials for SCM

Duhayon, Natasja; Fouchier, Marc; Vandervorst, Wilfried; Hellemans, L. (2003)

Dopant profiling in NixSi1-x gates with SIMS

Janssens, Tom; Kmieciak, Malgorzata; Kittl, Jorge; Fouchier, Marc; Lauwers, Anne; Kottantharayil, Anil; Vandervorst, Wilfried (2005)

Fabrication and characterization of full diamond tips for scanning-spreading resistance microscopy

Alvarez, David; Fouchier, Marc; Kretz, J.; Hartwich, J.; Schoemann, S.; Vandervorst, Wilfried (2004-06)

Fabrication of conductive AFM probes and their use in microelectronics

Fouchier, Marc; Alvarez, David; Eyben, Pierre; Duhayon, Natasja; Petry, Jasmine; Drijbooms, Chris (2003)

Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping

Fouchier, Marc; Eyben, Pierre; Alvarez, David; Duhayon, Natasja; Xu, Mingwei; Brongersma, Sywert; Lisoni, Judit; Vandervorst, Wilfried (2003-05)

High resolution scanning spreading resistance microscopy

Alvarez, David; Fouchier, Marc; Vandervorst, Wilfried (2002)

High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors

Alvarez, David; Fouchier, Marc; Hartwich, J.; Eyben, Pierre; Vandervorst, Wilfried (2003)

High-resolution scanning spreading resistance microscopy of surrounding-gate transistors

Alvarez, D.; Schömann, S.; Goebel, B.; Manger, D.; Schlösser, T.; Slesazeck, S.; Hartwich, J.; Kretz, J.; Eyben, Pierre; Fouchier, Marc; Vandervorst, Wilfried (2004-01)

Overview of 2D profiling in Imec

Duhayon, Natasja; Eyben, Pierre; Alvarez, David; Fouchier, Marc; Blasco, X.; Clarysse, Trudo; Vandervorst, Wilfried; Hellemans, L. (2003)

Probing local electrical properties in semiconductors with nanometer resolution

Vandervorst, Wilfried; Duhayon, Natasja; Eyben, Pierre; Alvarez, David; Xu, Mingwei; Fouchier, Marc; Clarysse, Trudo (2003)

Probing semiconductor technology and devices with scanning spreading resistance microscopy

Eyben, Pierre; Vandervorst, Wilfried; Alvarez, David; Xu, Mingwei; Fouchier, Marc (2007)

Pulsed force-scanning spreading resistance microscopy (PF-SSRM) for high spatial resolution 2D-dopant profiling

Eyben, Pierre; Fouchier, Marc; Albart, P.; Charon-Verstappen, J.; Vandervorst, Wilfried (2002)

Quantitative 2D-carrier profiling in semiconductors with sub-nm spatial resolution using SSRM

Vandervorst, Wilfried; Eyben, Pierre; Duhayon, Natasja; Alvarez, David; Fouchier, Marc; Xu, Mingwei (2003)

Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices

Alvarez, David; Hartwich, J.; Kretz, J.; Fouchier, Marc; Vandervorst, Wilfried (2003)

Scanning spreading resistance microscopy of fully depleted SOI devices

Alvarez, David; Hartwich, J.; Kretz, J.; Fouchier, Marc (2002)

Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips

Alvarez, D.; Hartwich, J.; Fouchier, Marc; Eyben, Pierre; Vandervorst, Wilfried (2003)

Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices

Vandervorst, Wilfried; Eyben, Pierre; Alvarez, David; Fouchier, Marc (2004)