Browsing by author "Contino, Antonino"
Now showing items 1-18 of 18
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21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Vega Gonzalez, Victor; Wilson, Chris; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Versluijs, Janko; Blanco, Victor; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Lesniewska, Alicja; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Pardons, Katrien; Barla, Kathy; Tokei, Zsolt (2019) -
Alternative metal recess for fully-self-aligned-vias
Contino, Antonino; Le, Quoc Toan; Sakamoto, Kei; Schleicher, Filip; Paolillo, Sara; Pacco, Antoine; Kesters, Els; Lorant, Christophe; Murdoch, Gayle; Lariviere, Stephane; Vega Gonzalez, Victor; Versluijs, Janko; Jaenen, Patrick; Teugels, Lieve; van der Veen, Marleen; Jourdan, Nicolas; Ciofi, Ivan; Boccardi, Guillaume; Tokei, Zsolt; Wilson, Chris (2020) -
Boosting carrier mobility of synthetic few layer graphene on SiO2 by interlayer rotation and decoupling
Wu, Xiangyu; Chuang, Yaoteng; Contino, Antonino; Soree, Bart; Brems, Steven; Tokei, Zsolt; Heyns, Marc; Huyghebaert, Cedric; Asselberghs, Inge (2018) -
Circuit delay and power benchmark of graphene against Cu interconnects
Contino, Antonino; Ciofi, Ivan; Baert, Rogier; Wu, Xiangyu; Asselberghs, Inge; Celano, Umberto; Wilson, Chris; Tokei, Zsolt; Groeseneken, Guido; Soree, Bart (2019) -
Doping of graphene for the application in nano-interconnect
Wu, Xiangyu; Asselberghs, Inge; Politou, Maria; Contino, Antonino; Radu, Iuliana; Huyghebaert, Cedric; Tokei, Zsolt; Soree, Bart; De Gendt, Stefan; De Feyter, Floris; Heyns, Marc (2017) -
Evaluation of multilayer graphene for advanced interconnects
Politou, Maria; Wu, Xiangyu; Asselberghs, Inge; Contino, Antonino; Soree, Bart; Radu, Iuliana; Huyghebaert, Cedric; Tokei, Zsolt; De Gendt, Stefan; Heyns, Marc (2017) -
Graphene interconnects – High performance twisted 20 nm graphene ribbons
Wu, Xiangyu; Asselberghs, Inge; Huyghebaert, Cedric; Contino, Antonino; Soree, Bart; Heyns, Marc; Tokei, Zsolt (2018) -
Impact of litho-patterning variations on the electrical performance and variability of advanced interconnects
Ciofi, Ivan; Roussel, Philippe; Baert, Rogier; Kocaay, Deniz; Contino, Antonino; Croes, Kristof; Saad, Yves; Gao, Weimin; Moroz, Victor; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2018) -
Impact of wire geometry on interconnect RC and circuit delay
Ciofi, Ivan; Contino, Antonino; Roussel, Philippe; Baert, Rogier; Vega Gonzalez, Victor; Croes, Kristof; Badaroglu, Mustafa; Wilson, Chris; Raghavan, Praveen; Mercha, Abdelkarim; Verkest, Diederik; Groeseneken, Guido; Mocuta, Dan; Thean, Aaron (2016) -
Modeling of edge scattering in graphene interconnects
Contino, Antonino; Ciofi, Ivan; Wu, Xiangyu; Asselberghs, Inge; Celano, Umberto; Wilson, Chris; Tokei, Zsolt; Groeseneken, Guido; Soree, Bart (2018) -
Modeling of graphene for interconnect applications
Contino, Antonino; Ciofi, Ivan; Politou, Maria; Verkest, Diederik; Mocuta, Dan; Soree, Bart; Groeseneken, Guido (2016) -
Modeling of via resistance for advanced technology nodes
Ciofi, Ivan; Roussel, Philippe; Saad, Yves; Moroz, Victor; Hu, Jojo; Baert, Rogier; Croes, Kristof; Contino, Antonino; Vandersmissen, Kevin; Gao, Weimin; Matagne, Philippe; Badaroglu, Mustafa; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2017) -
Multi-layer graphene interconnect - a feasibility study
Politou, Maria; Wu, Xiangyu; Contino, Antonino; Soree, Bart; Huyghebaert, Cedric; Lin, Dennis; Radu, Iuliana; Tokei, Zsolt; Asselberghs, Inge (2016) -
RC benefits of advanced metallization options
Ciofi, Ivan; Roussel, Philippe; Baert, Rogier; Contino, Antonino; Gupta, Anshul; Croes, Kristof; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2019) -
RC modeling, scaling trends and mitigation approaches
Ciofi, Ivan; Roussel, Philippe; Baert, Rogier; Contino, Antonino; Gupta, Anshul; Croes, Kristof; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2018) -
Resistance benchmark of graphene against Cu interconnects with scaling
Contino, Antonino; Ciofi, Ivan; Groeseneken, Guido; Soree, Bart (2019) -
Three-layer BEOL process integration with supervia and self-aligned-block options for the 3nm node
Vega Gonzalez, Victor; Wilson, Chris; Briggs, Basoene; Decoster, Stefan; Versluijs, Janko; Lesniewska, Alicja; Paolillo, Sara; Baert, Rogier; Puliyalil, Harinarayanan; Bekaert, Joost; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Teugels, Lieve; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Gupta, Anshul; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; Dupas, Luc; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Debacker, Peter; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Dillemans, Leander; Chen, Yi-Fan; Tokei, Zsolt (2019) -
UV nanosecond laser annealing for Ru interconnects
Jourdan, Nicolas; Roze, Fabien; Tabata, Toshiyuki; Lariviere, Stephane; Contino, Antonino; Mazzamuto, Fulvio; Tokei, Zsolt (2020)